Abstract

The size-dependent electro-thermo-mechanical responses of multilayer cantilever microactuators by Joule heating is investigated. An analytical expression of the deflection of three-layered cantilever microactuators subjected to non-uniform temperature variations and mechanical loading is derived by using the modified couple stress theory and the two-variable method. The predicted result is in good agreement with the experimental data. Compared with the results from the classical beam theory, the influence of the size-dependency on the deformation, equivalent bending rigidity and average thin film stress are discussed. The results reveal that the equivalent bending rigidity of multilayer cantilever microactuators predicted by the present model is larger than that from the classical beam model, which decreases the size-dependent bending response of the microactuator. In addition, the size-dependent average stresses of thin film is more likely to produce mechanical failure. The current study is helpful for the design of micro/nano-actuators.

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