Size Controllable Micro-nano Fluidic Systems Based on Various Angle Sputtering Deposition

Abstract

Micro-nano fluid systems are widely used in biochemistry and are important to MEMS research. For the fabrication of microfluidic systems, controllable size nanochannels have always been a research challenge. This article proposes a method for fabricating nanochannels based on angle deposition, which can regulate channel size at tens of nanometers. At the same time, DNA molecular stretching simulations and experiments were conducted to verify the application prospects of the sample in the biological field.