Abstract
A novel six-beam piezoresistive accelerometer with self-cancelling cross-axis sensitivity was constructed using a unique porous silicon micromachining technique. The comparatively low sensitivity of a six-beam structure, due to the additional beams, can be simply overcome using a summing circuit. Moreover, the cross-axis sensitivity can be significantly reduced. A sensor with a summing circuit can exhibit a sensitivity of 0.68 mV/g with a nonlinearity of <2.0% up to 8 g, a cross-axis sensitivity of <1.0%, and a first resonant frequency of /spl sim/4.24 kHz.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
