Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE)

Abstract

A novel approach for the fabrication of micropatterns where dye molecules can be site-selectively desposited is described. The micropatterns were fabricated on the surface of fused silica plates using the technique of laser-induced backside wet etching (LIBWE). Prior to the LIBWE process, the surface properties of the fused silica plates were modified with self-assembling trimethoxysilanes bearing functional moieties. On the non-irradiated areas, the self-assembled monolayers (SAMs) survived the LIBWE process, and the remaining SAM acted as a template for the subsequent dye deposition either with chemical bonding or physical adsorption. Site-selective dye deposition was visualized with fluorescence microscopic observation. These results are applicable for micro-fluidic reactors and chemical sensors.