Abstract

To reduce the manufacturing cost, soda-lime glass (SLG) is often used as the substrate for thin-film solar cells. It is known that SLG contains about 16 wt% Na in the form of Na <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O. During the growth of thin films, Na ions may diffuse out from SLG and diffuse into the grown thin films and affect the optoelectronic properties of the thin films. The widely used commercial F-doped Sn <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> O (FTO) glass (Teck 15) has the structure SLG/FTO/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /FTO. The first FTO layer and the SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer are very thin. The SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer is often expected to be a barrier layer for Na out-diffusion from SLG. However, our transmission electron microscopy (TEM) study indicates that there is a significant amount of Na existing in the second FTO layer, further indicating that SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> may not be a good barrier layer for Na out-diffusion. Therefore, we have investigated the possibility of a SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer as a barrier layer for Na out-diffusion from SLG. We have deposited two types of samples, SLG/SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> /FTO and SLG/FTO, at 550°C. For comparison, these samples were also annealed at temperatures between 550° and 650°C. The as-deposited and annealed samples were examined by TEM, X-ray energy dispersive spectroscopy (EDS) and secondary-ion mass spectrometry (SIMS). We found that SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> is indeed an effective barrier layer for Na out-diffusion. Thermal annealing can enhance Na diffusion. It should be pointed out that our deposited SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer may behave differently from the SiO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> layer seen in the commercial FTO-coated glass.

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