Abstract

A novel low temperature co-fired ceramic (LTCC) material was fabricated by zinc titanate (ZnTiO3) ceramics doped with B2O3-BaO-SiO2-ZnO-Li2O (BBSZL) glass. The influences of BBSZL glass on wetting behavior, sintering activation energy, phase composition, microstructure and microwave dielectric properties were investigated. The experimental results show that the sintering temperature of ZnTiO3 ceramics can be reduced from 1 100 to 925 °C, meanwhile the sintering activation energy is decreased from 465.32 to 390.54 kJ·mol-1 by BBSZL glass aid, respectively. Moreover, BBSZL glass can inhibit the high Q×f ZnTiO3 phase decompose into the low Q×f value Zn2TiO4 phase, which is propitious to obtain high Q×f value LTCC material. The ZnTiO3-BBSZL composite sintered at 925 °C displays the excellent microwave dielectric properties with er of 21.8, Q×f value of 42000 GHz, and τf of -75 ppm·°C-1.

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