Abstract
Single-shot laser ablation of polyimide has been investigated with UV-Ar+-laser radiation (λ = 270-315 nm) for pulse lengths between 140 ns and 5 µs. The irradiated polymer surface was studied with respect to its morphology and ablated depth by means of atomic force microscopy. The dependence of the ablation threshold on laser pulse-length and intensity can be tentatively interpreted on the basis of a thermal process and a (thermal or non-thermal) mechanism which diminishes the activation energy for the desorption of species from the surface.
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