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Abstract
Miniaturized spectrometers have significant potential for portable applications such as consumer electronics, health care, and manufacturing. These applications demand low cost and high spectral resolution, and are best enabled by single-shot free-space-coupled spectrometers that also have sufficient spatial resolution. Here, we demonstrate an on-chip spectrometer that can satisfy all of these requirements. Our device uses arrays of photodetectors, each of which has a unique responsivity with rich spectral features. These responsivities are created by complex optical interference in photonic-crystal slabs positioned immediately on top of the photodetector pixels. The spectrometer is completely complementary metal–oxide–semiconductor (CMOS) compatible and can be mass produced at low cost.
Highlights
Miniaturized spectrometers have significant potential for portable applications such as consumer electronics, health care, and manufacturing
Here we developed a scalable method to realize random spectral filters based on photonic crystals (PCs)
In contrast to quantum dots where the fabrication could be complicated by the use of non-standard complementary metal–oxide–semiconductor (CMOS) materials and processes, PC slabs can be defined via single exposure photolithography and only require standard CMOS materials
Summary
Miniaturized spectrometers have significant potential for portable applications such as consumer electronics, health care, and manufacturing. A seminal work by Bao and Bawendi[17] experimentally demonstrated a high-resolution spectrometer based on random spectral filters. They are extremely compact, with sizes similar to light-sensing pixels in CMOS image sensors. To work as a spectrometer, arrays of different PC slabs are fabricated on top of a CMOS imaging sensor.
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