Abstract
This paper reports on the electrochemical and photo(electro)chemical fabrication of single-crystalline InP membranes with homogeneous surfaces allowing for adjustable pore shapes from roundish to square-like and various surface morphologies from extremely flat to cone-like pore wall tips. The InP membrane thickness is tunable from several tens of μm to almost 500 μm. FFT impedance data measured in-situ during pore etching can be easily fitted by an RC-component in series with a resistor and allow for precise in-situ prediction of the final membrane surface morphology and easy process parameter adjustment for the production of membranes with arbitrary membrane thicknesses.
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