Abstract
The combination of high-mechanical flexibility and high-optical reflectivity makes planar photonic crystal diaphragms excellent mirrors for optical resonators used in fiber-optic pressure sensing. We have developed a standard silicon process to construct a monolithic photonic crystal-based crystalline silicon membrane. We report on three photonic crystal pressure sensors with different compliances, and discuss the following figures of merit: 1) spectral shift sensitivity; 2) optical sensitivity; 3) pressure sensitivity; 4) resolution; and 5) dynamic range. When compared with a sensor made with an oxide diaphragm, each of our sensors is at least an order of magnitude more sensitive, with a spectral shift sensitivity magnitude of up to 8.6 nm/kPa. We show that the fabrication can be tailored to optimize figures of merit depending on the needs of the application. [2014-0151]
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