Single step channeling in glass interior by femtosecond laser

Abstract

Channeling inside a transparent material, glass, by femtosecond laser was performed by using a single step process rather than hybrid processes that combine the laser irradiation with an additional tool or step to remove the material. Tightly focusing of a single femtosecond laser pulse using proper optical and laser processing parameters could induce the micro-explosion and could create voids inside transparent materials, and the effects of these parameters on the resultant feature geometry and channel length were studied. Understanding of the channel length variation at different locations from the specimen surface could enhance prediction capability. Taking into account of the laser, material, and lens properties, numerical models were developed to predict the absorption volume shape and size at different focusing depths below the surface of a specimen. These models will also be validated with the variation in feature and channel lengths inside the specimen obtained from the experiments. Spacing between adjacent laser pulses and laser parameters was varied to investigate effects of channel overlapping and its influence on long channel formation.