Single-shot surface profiling by multiwavelength interferometry without carrier fringe introduction

Abstract

As a single-shot interferometric technique, spatial carrier interferometry has been thoroughly investigated, and it has been shown to have some problems, such as low spatial resolution. To overcome the problems, we propose a novel single-shot surface profiling technique that does not require carrier introduction. It is based on a model-fitting algorithm and estimates the model parameters and the heights of plural points simultaneously based on their multiwavelength intensity data. The validity of the proposed method is demonstrated by computer simulations and actual experiments.