Abstract
Crossed grating 3×3 beam lateral shear interferometry for extended range wave front sensing is presented. A Fresnel diffraction pattern of two multiplicatively superimposed linear diffraction gratings each generating three diffraction orders is recorded. A simple solution employs a common crossed binary amplitude Ronchi grating with spatial filtering. Digital processing of a single-shot pattern includes separating multidirectional pairs of orthogonal lateral shear interferograms, retrieving second harmonics of their intensity distribution, and calculating shearing phases. Single-frame automatic fringe pattern processing based on the Hilbert-Huang transform is used for this purpose. Using second harmonics extends the aberration measurement range since they encode self-imaging free two-beam interferograms without contrast modulations. Experimental works corroborate the principle and capabilities of the proposed approach.
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