Abstract
We have constructed an extremely precise optical system for hard-x-ray nanofocusing in asynchrotron radiation beamline. Precision multilayer mirrors were fabricated, tested, andemployed as Kirkpatrick–Baez mirrors with a novel phase error compensator. In the phasecompensator, an at-wavelength wavefront error sensing method based on x-rayinterferometry and an in situ phase compensator mirror, which adaptively deforms withnanometer precision, were developed to satisfy the Rayleigh criterion to achievediffraction-limited focusing in a single-nanometer range. The performance of the optics wastested at BL29XUL of SPring-8 and was confirmed to realize a spot size of approximately7 nm.
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