Abstract
High quality superconducting YBa 2Cu 3O 7− x (YBCO) films were deposited on LaAlO 3 ( 1 0 0 ) substrates at a high growth rates of 0.2–1 μm /min with high reproducibility by a novel photo-assisted metalorganic chemical vapor deposition process with single liquid precursor delivery technique. The photo irradiation technique can dramatically increase the growth rate and the single liquid precursor delivery technique can significantly improve the process reproducibility. X-ray diffraction analysis indicated that single phase, c-axis oriented and well ab-aligned YBCO films were high reproducibly prepared. The as-grown YBCO films showed critical temperatures ( T c) of 91 K with the transition width ( ΔT c) less than 1 K, and self-field critical current densities ( J c) of 4.6×10 6 A/cm 2 at 77 K.
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