Abstract
SummaryIn this paper the formation of wear‐resistant coatings based on titanium and aluminum compounds using vacuum arc discharge and molecular nitrogen as a working gas is discussed. The experiments were carried out using an installation containing two independent evaporators and a system for attenuation and purification of the plasma flow. To obtain a high‐quality coating, it is necessary to ensure the equality of the ion flux densities coming to the substrate. The results of the experiments show that by changing the bias voltage on the substrate it is possible to adjust the content of elements in the coating and thus to control its parameters. Multi‐layer coatings have better performance characteristics, but require an improved degree of purification of the plasma flow from the droplet fraction.
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