Abstract

Subwavelength electroluminescent sources with spatial, spectral, and polarization controlling capabilities are critical elements for optical imaging and lithography beyond the diffraction limit. Here, we show that the electroluminescence from single, strain-free InGaN nanodisks embedded in self-assembled GaN p-n nanorods can span the entire visible spectrum with a large linear polarization ratio (∼0.85). Furthermore, this unique nanodisk-in-nanorod geometry enables the realization of the ultrasmall footprint light-emitting diodes (LEDs) to be used as subwavelength light sources. Using these nano-LEDs, we are able to demonstrate near-field, subwavelength photolithography by controlling the exposure time and light intensity from single InGaN nanodisks at chosen wavelengths.

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