Abstract
In this paper, we propose a simplified measurement called single-incidence polarimetry measurement (SPM) to obtain optical characteristics such as di-attenuationP, variation of phase difference Δ and depolarization index d on material surface. Compared with tradition Mueller matrix polarimetry which needs multiple (at least 4) Stokes vectors as incidences in experiments, SPM only needs single polarized light as incidence, which simplifies experimental procedures tremendously and increases experimental efficiency. In addition, SPM is suitable for complicated materials such as thick lump samples, uneven surfaces, powder and liquid which are not available on traditional ellipsometers, e.g., the variable-angle spectroscopic ellipsometer (VASE) produced by J. A. Woollam Company. The objectivity and lower complexity of SPM are verified by the contrast experiments with Mueller matrix polarimetry. The advantage that SPM is more suitable for complicated experimental condition is demonstrated by the contrast experiments with VASE. All the analyses and discussions are realized by the root mean squared error (RMSE) between referenced values and experimental results. In conclusion, SPM can realize low-cost and easy-assembled measurements on complicated and depolarized surfaces rather than obtaining higher precision data on smooth and thin surfaces. In the aspect of efficiency and convenience, SPM is useful to analyze optical characteristics qualitatively.
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