Single Fundamental-Mode Output Power Exceeding 6 mW From VCSELs With a Shallow Surface Relief

Abstract

A single fundamental-mode output power of 6.5 mW was achieved from an 850-nm vertical-cavity surface-emitting laser (VCSEL) with a shallow surface relief, the highest single-mode power ever reported using this technique. The VCSELs were fabricated from epitaxial material grown to yield an antiphase reflection from the topmost layer. A circular surface relief, acting as a mode discriminator, was etched in the center to reduce the mirror loss for the fundamental mode. This "inverted" surface-relief technique offers relaxed etch depth control and, therefore, improves reproducibility and yield.