Abstract
The performance of the oxide-confined surface-relief (SR) structure vertical-cavity surface-emitting laser (VCSEL) is simulated and analyzed by using the three-dimensional finite-difference time-domain (FDTD) method. The impacts of the device structure parameters on the far-field characteristics are researched. A single-fundamental-mode SR VCSEL with an oxide-aperture of 15 μm is designed and produced. The single-mode power of the VCSEL is 5mW, the threshold current is 2.5 mA, far-field divergent angles range from 7.8° to 10.8° and the side-mode suppression ratio is over 30 dB. The optical and electrical properties of the device are in agreement with the results of FDTD simulation, which shows that the SR technology can effectively suppress the higher-order-mode lasing, and make the SR VCSEL work in a single mode under a larger oxide aperture.
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