Abstract
A high-sensitivity phase variation displacement sensor is presented in this paper. The sensor is designed using a Coplanar Waveguide (CPW) terminated with a LC resonator. The inductive part is implemented with a narrow metallic trace and the capacitance is realized with a rectangular patch. In the final optimized design, the patch width is tapered to achieve higher linearity. A thick dielectric slab is displaced above the capacitive patch, modifying the overall capacitance. This in turn results in variation of the <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$S$</tex> <inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">11</inf> phase measured at a single frequency. The sensing principle is analyticaly discussed using a circuit model and full-wave electromagnetic simulations, and verified by fabrication and measurement.
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