Abstract

Summary form only given. We present the fabrication and characterization results of metal-based single electron transistors (SETs) with niobium (Nb)/Nb oxides system, Several types of ultra-small tunnel junction devices, which include diodes with double and triple junctions and SETs with side gate structure, were fabricated by atomic force microscope (AFM) nano-oxidation process. Clear single-electron charging effects such as Coulomb gap, Coulomb staircase and Coulomb oscillation characteristics were observed at about 100 K.

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