Single discharge of the matrix source of negative hydrogen ions: Influence of the neutral particle dynamics

Abstract

The study presents two-dimensional (2D) fluid-plasma-model description of a planar-coil inductively-driven discharge, considered as a single element of a matrix source of volume-produced negative hydrogen ions. Whereas the models developed up to now have been directed towards description of the charged particle behavior in the discharge, including that of the negative ions, this model stresses on the role of the neutral particle dynamics and of the surface processes in the formation of the discharge structure. The latter is discussed based on comparison of results obtained for discharges in a flowing gas and at a constant gas pressure as well as for different values of the coefficient of atom recombination on the walls. The conclusions are that the main plasma parameters – electron density and temperature and plasma potential – determining the gas discharge regime stay stable, regardless of changes in the redistribution of the densities of the neutral particles and of the positive ions. With regards to the volume production of the ions, which requires high density of (vibrationally excited) molecules, the impact on the degree of dissociation of the coefficient of atom recombination on the wall is discussed.