Abstract
c-axis oriented La2-xSrxCuO4 films have been prepared by the dc magnetron sputtering method. Smooth surface morphology and excellent crystallinity of the films are observed by SEM and TEM, respectively. It was found that the zero resistance temperature Tc0 and the lattice parameter of the films are strongly dependent on Sr content and oxygen partial pressure of the sputtering gas. Increasing the O2:Ar ratio can remedy the oxygen deficiency and improve the superconductivity of the films.
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