Abstract

Aluminum-doped zinc oxide (AZO) nanoparticles powder were prepared using low-pressure spray pyrolysis (LPSP). AZO nanoparticles sized 16 and 20 nm with nearly spherical shapes and a crystal size of 11 and 15 nm were yielded using zinc acetate precursor at a low-pressure of 8.0 kPa with a pyrolysis temperature of 800 and 1000 °C. The thin films were deposited using a dip-coating method derived from the as-prepared AZO nanoparticles. The thin films that were heated for 1.5 h showed a transmittance higher than 97% in the wavelength range of 400–800 nm and a resistivity of 4.0 × 103 ohm cm with a film thickness of 250 nm. The high crystallinity and high transmittance of AZO nanoparticles that are directly synthesized using the LPSP process have potential for applications as transparent conducting material.

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