Single crystal piezoelectric composite transducers for ultrasound NDE applications

Abstract

Single crystal piezoelectric composite transducers including 75 MHz PC-MUT (piezoelectric composite micromachined ultrasound transducers), diced 10 MHz and 15 MHz 1-3 composite transducers were successfully demonstrated with broad bandwidth and high sensitivity. In this paper, the design, fabrication and characterization of composite transducers are reported. C-scan experiments for SiC ceramic samples were performed using these composite transducers as well as some commercial NDE transducers. The results suggest that significant improvements in resolution and penetration depth can be achieved in C-scan NDE imaging using single crystal composite broadband transducers.