Abstract
The multislice method has been adapted to simulate annular dark field (ADF) scanning transmission electron microscope (STEM) images. In the STEM image simulation, a highly focused electron probe is scanned across a specimen and the scattered intensity, accumulated over an annular detector, is recorded as a function of probe position. Each pixel in the STEM image is determined by an entire multislice calculation for a particular position of the incident probe. This N4 process is very computationally expensive and currently requires the use of a supercomputer to achieve runtimes of less than a day.The simulated specimen consisted of a (111) silicon crystal substrate, which was a multiple of 94 Å (30 slices) thick, followed by an additional slice containing a single gold atom. Slice potentials were 38.4 Å x 39.9 Å (256 x 256 pixels) in size, which set the maximum included scattering angle to 79 mrad.
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