Abstract

Atomic structures of scanning tunneling microscopy (STM) tips were characterized by reflection electron microscopy (REM). The Si(111)7×7 surface was observed simultaneously by REM and STM in an ultrahigh vacuum electron microscope. In high-resolution REM images of the specular beam reflection, a tungsten tip apex was observed with its mirror image. The distance between the true and the mirror images was used to estimate the tip–surface distance. As the tip scanned over the Si(111) surface in STM experiments, the tip apex was scraped to give a plateau of a (110) atomic surface. An atomic-resolution STM image of the Si(111)7×7 surface was obtained when the STM tip apex had a single atom on the (110) terrace.

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