Abstract
Surface acoustic waves (SAW) with a shear horizontal polarized displacement (SH-SAW) can be used to determine mechanical and electrical properties of an adjacent liquid. We propose a new multichannel SH-SAW microsensor for liquid characterization. The SH-SAW microsensor, which is fabricated on 36° rotated Y-cut X-propagating LiTaO3, consists of three SAW delay lines. The propagating surfaces of two of the delay lines are metallized and electrically shorted, and the other one has a free surface which is an electrically active area. The viscosity, conductivity and permittivity of liquid are obtained simultaneously using the multichannel SH-SAW microsensor.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
