Abstract
We present a dispersive interferometry of optical frequency comb for simultaneous measuring absolute distance and angle. The reconfigured Michelson interferometer can emit two parallel measured beams and one reference beam. The three pulse beams interfere with each other, and the interference spectrum is sampled by a spectrometer. It is simultaneously modulated by the three optical path differences, which contains the information of absolute distance and angle and can be demodulated by a Fourier transform. By making an angle measurement comparison with a calibrated turntable, the proposed method shows that the obtained mutual agreement is better than 3 arcsec in the range of ± 5°. The commercial interferometer and autocollimator are used to verify the feasibility of the proposed method for precision distance and angle measurement.
Highlights
P RECISION measurement of multi-degree-of-freedom is essential for various advanced engineering and science such as machine tools calibration [1], assembly detection [2] and position measuring [3]
We present a dispersive interferometer of femtosecond pulse laser for distance and angle measurement simultaneously
To begin with we provide a brief description of the principle of dispersive interferometry using an optical frequency comb
Summary
P RECISION measurement of multi-degree-of-freedom (multi-DOF) is essential for various advanced engineering and science such as machine tools calibration [1], assembly detection [2] and position measuring [3]. The methods based on a combination of laser interference and laser collimation have been widely used in the field of multi-DOF measurement [4], [5] It can achieve the nanoscale ranging accuracy and the arcsecond angular resolution. The multi-DOF measurement based on the laser interference and the laser collimation is mainly used to calibrate machine tools or measure geometric motion errors of the linear guide It has been sharply limited in industrial measurement [6]. The angular interferometer can measure angle by calculating the ratio between the optical path variation of two measured path and the separation distance between them It has clear advantages, such as higher precision, accuracy and larger ranges [9]. The approach has a great development prospect for the potential multi-DOF measurement in the field of the largescale metrology
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