Abstract
The complementary nature of electron energy-loss spectroscopy (EELS) and energy dispersive spectroscopy (EDS) signals makes it highly desirable to acquire both during transmission electron microscope (TEM) investigations of materials. With ongoing improvements in electron instrumentation and detectors, it is now practical to acquire joint EELS-EDS spectrum image data for materials analysis, all the way from large area mapping down to atomic scale analysis. This paper shows data over a range of different experimental conditions that show the complementary nature of the techniques and highlight the strength of each. In particular, the attention is focused on the chemical and compositional analysis of samples obtained from the latest generation of 3D NAND memory and also FINFET semiconductor devices currently available in the market.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
