Abstract
A new remote dry processing with a focusing and deflection system is proposed to accurately control the energy, flux, and arrival position of reactive particle species on the nanoscale. The trajectory simulations of the negative ion extraction and transport for designing a compact separator based on the concept are performed using the SIMION software. In the compact separator, the ion beam extracted from a plasma source can be deflected in two stages through two pairs of magnets by selecting only specific ions so that it can be laterally drawn out. It is shown from the results of the simulation that the ion beams with good focusing properties, high directivity, and a sufficient current amount can be successfully extracted from the plasma source and transported to the reactor vessel through the focusing and deflection system.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.