Abstract
This simulation study investigates the influences of sampling schemes, errors in the data and depth profiling functions on the extraction of the depth profiles from angle-resolved XPS data. An equiangular sampling scheme is more susceptible to the ill-posedness in the inverse operation of the Laplace transform than equidistance or gravimetric samplings. The influence of errors in the data can be considerable, depending on the types of depth profiles. Smooth depth profiling functions are well recovered, even for data with 10% errors. For discontinuous depth profiles, regenerated depth profiles do not represent the sharp change of original depth profiles at the interface. © 1997 John Wiley & Sons, Ltd.
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