Abstract
Piezoelectric energy harvester produces electrical energy based on direct piezoelectric effect. Cantilevered structures with piezoelectric layers are used as MEMS piezoelectric energy harvester for more than one decade. This paper reports on simulation study on performance of MEMS piezoelectric energy harvester with optimized substrate to piezoelectric layer thickness ratio. Stainless steel and single crystal PMN32 are used as substrate and piezoelectric materials respectively. Four different structures are designed and the thickness ratio of substrate to piezoelectric layer is varied to study its effect on performance of MEMS piezoelectric energy harvester. The performance of MEMS piezoelectric energy harvester is simulated using the software COMSOL Multiphysics.
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