Abstract
Simulation studies on evacuation process in liquid wall chamber have been carried out. The evacuation speed in wetted wall concepts is a critical issue for pulse repetition rate. Then we have analyzed the evacuation process in high vacuum region using the DSMC code, which solves the Boltzmann equation. The simulation results of the DSMC code show that the effect of viscosity can't be neglected in the region where the gas pressure goes down to 10 −3–10 −4 Torr, near the saturated vapor pressure. When the surface temperature of liquid wall is adequately cooled, the evacuation speed from 10 −2 to 10 −4 Torr is rather fast because of the gas flow to the wall.
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