Abstract
The physical characteristics for the study of two-dimensional inductively coupled plasma (ICP) discharge with different designs of copper coil and gas composition are presented in this paper. And this numerical model is a typical inductively coupled plasma discharge. Compared with former publications studying in ICP discharge, our simulation results indicate some new discoveries. First, the inductive coil gaps are arranged at different distances and their physical properties are studied in argon environment. The maximum electron density, electron temperature and macroscopic gas temperature are obtained at the best coil gap distance for discharge. Then, the inductive coils on the quartz tube without changing the coil gaps between the coils are placed in different positions and the discharge properties are also studied in argon environment. The maximum electron density, electron temperature and macroscopic gas temperature are obtained in the best position for discharge respectively. Finally, the physical characteristics of the ICP discharge in different gas compositions (other physical parameters were unchanged) are studied and the related important chemical reactions are also been described. It is concluded that the best discharge effect of argon gas is obtained under the same discharge conditions.
Highlights
Coupled plasma (ICP) discharge is that the RF source drives the antenna through a matching network to stimulate the production of a radio frequency magnetic field, and the alternating magnetic field induces the production of a radio frequency electric field in the inductively coupled plasma
The inductive coil gaps d is arranged at different distances, d1=35 mm, d2=20 mm, d3=50 mm, respectively, and the physical properties are studied in argon environment and the same pressure 50 Pa and power 5 kW
The maximum electron density, electron temperature and macrogas temperature are obtained in the best coil gap d2 for discharge, the electron density increases with the decrease of the inductive coil gap after simulating the different inductive coil gaps, and the distribution of electron density is more aggregated
Summary
Coupled plasma (ICP) discharge is that the RF source drives the antenna through a matching network to stimulate the production of a radio frequency magnetic field, and the alternating magnetic field induces the production of a radio frequency electric field in the inductively coupled plasma. By controlling parameters such as power and pressure, the spatial distribution of plasma density and electron temperature was investigated in the argon discharge. Veitzer et al studied a numerical simulation model for Inductively Coupled Plasma (ICP) sources.. The induction frequency over the range investigated is proved to have little significant effect on the distributions of plasma fields This numerical model is helpful to determine the optimum conditions for the generation of the desired plasma. They have studied different research on the basic physical characteristics of ICP discharge, they have not done in-depth research on the influence of parameters, such as inductive coil and different background gases on ICP.
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