Abstract
AbstractMultiple interaction computer simulations have been used to determine the properties of collision cascades in liquid In targets induced by normally incident 5 keV Ar+ ions. Below the first atomic layer the cascade becomes Thompson-like relatively quickly. However, within the first atomic layer the angular distribution of moving atoms became forward peaked by 150 fs and remained so until,∼300 fs. Energy and angle resolved (EARN) spectra were calculated for the ejected atoms. The peak of the energy distribution shifted to lower energies at larger ejection angles, and the angular distributions became broader for lower energy particles. Both results agree with recent experimental data, and with a simple model proposed bg Garrison. Our results suggest that the detailed structure of the surface layer is very important in the sputtering process.
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