Simulation on 3-D Glass Isotropic Chemical Etching Process for Microfludic Chip Based on Cellular Automata Model

Abstract

For Isotropic chemical etching properties of glass,an algorithm based on improved continuous cellular automata(CA)model is produced,which develops the traditional CA model.It can be used for wet etching of glass in three-dimensional(3-D)space.To improve the efficiency of algorithm,structure with linked list data is used to store etched cell.With the improvement of the storage mode,a 3-D cellular matrix can be stored in 2-D Array.The result of simulation is displayed with OpenGl 3-D technology.The glass etching simulation program based on common personal computer platforms has been realized with high resolution(4000×4000 Pixels)and visualizing results in 3-D space.The results of etching experiments are used as comparison to assess the implementations,which show that the model is able to forecast the result of etching glass.This study shows that 3-D CA model is an effective solution to the glass etching process task.