Abstract
We are developing a new x-ray microcalorimeter based on a superconducting transition edge sensor (TES) as an imaging sensor. Our measurement shows unique waveforms which we consider as an expression of thermal nonuniformity of TES films. This arises from the different thermal responses, so that response signal shapes would vary according to the position of the incident x-ray. This position dependency deteriorate the measured energy resolution, but with appropriate waveform analysis, this would be useful for imaging device. For more inspection, we have developed a simulation code which enables a dynamic simulation to obtain a transient response of the TES by finite differential method. Temperature and electric current distributions are calculated. As a result, we successfully obtained waveform signals. The calculated signal waveforms have similar characteristics to the measured signals. This simulation visualized the transition state of the device and will help to design better detector.
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