Simulation of the First Two Microseconds of an Ar CCP Cold Plasma Discharge by the PIC-MCC Method

Abstract

Most simulations of capacitively coupled radiofrequency cold-plasma discharges (RF-CCP) are focused on the steady state, but the initial discharge time is important for understanding the ignition process and the behavior of pulsed discharges. In this work, the time evolution of an RF-CCP Ar discharge was simulated, considering a pressure of 66.6 Pa, a distance between the electrodes of 20 mm, and RF (13.56 MHz) bias amplitudes in range 100–400 V, and the discharge evolution was observed for the first 2 μs. A 1d3v (1 dimension for particle positions and 3 dimensions for particle velocities) electrostatic particle in cell with montecarlo collisions (PIC-MCC) model was used, with separated particle weights for electrons and ions that varied with the particle density. During the simulations, the time evolution of the electron density, mean electron energy, Debye length, Debye number, and plasma frequency were observed. The spatial distribution of electric potential and the electron energy distribution function were also monitored. A transition between two regimes was observed; the first was characterized by strong oscillation of the mean electron energy and an exponential increase of the mean plasma density with time, while in the second the mean electron energy was lower, and the plasma density increased linearly. The time required for the transition between the two regimes increased as the RF amplitude was raised from 100 to 250 V, then decreased with a further increase of the RF amplitude to 300 and 350 V.