Simulation of the evolution of rough surfaces by sputtering using the binary collision approximation

Abstract

The evolution of triangular surface structures with different sizes, the roughening of initially smooth surfaces, and the smoothing of initially rough surfaces were studied by computer simulations for sputtering by 5 keV argon on copper at normal incidence as a function of incident fluence. The program SDTrimSP-2D was used in binary collision approximation, diffusion was neglected. As already predicted by Sigmund [J. Mater. Sci. 1973, 8, 1545], a triangular ridge is relatively stable under bombardment at low fluences. However, at fluences above a critical fluence, it eventually flattens out and finally disappears. Initially smooth surfaces get rougher during bombardment, the roughness increases as the square root of incident fluence. This effect is more pronounced for larger metaparticle sizes. Initially rough surfaces get smoother by sputtering, the final smoothness depends on the initial degree of roughness. The smoothing process follows a characteristic pattern with smaller-scale roughness disappearing first and larger-scale roughness remaining stable until higher fluences. This effect gets visible in the Fourier-spectrum of the rough surface as damping of higher frequencies.