Abstract
This paper describes the capabilities of the Bosch process simulation for microand nanostructures with the aid of NEMO ETCHING software. The heart of this program is an original hybrid algorithm, which is based on the Monte–Carlo method and on the cell-graph approximation of the string model. It is shown that this algorithm considerably improves the performance of the model without loss of accuracy. The etching model is calibrated according to the real Bosch experiment process. The comparison between the simulation and experimental results shows this model is highly accurate.
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