Abstract
The program SURF has been developed to simulate surface roughness effects in elastic recoil detection analysis (ERDA). The Program calculates the recoil energy spectrum from a sample with a rough surface from a superposition of spectra, each corresponding to a subdivision of the beam spot. All parameters which influence the depth resolution are taken into account. The algorithm was tested successfully on well defined periodic structures which were produced by ion etching of Si. Recoil energy spectra measured with 200 MeV 127I ions of samples with random roughness exhibit two characteristic features: large broadening and lower yield in the high energy region. Both features are well reproduced in the simulated spectra, from which the variance of the statistical roughness can be deduced. The program can assist in the understanding of surface roughness effects, and enable such effects to be identified in concentration depth profiles.
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