Abstract
A model of reactive sputtering of a sandwich target in nitrogen is considered. The target temperature is determined as a function of the ion current density. For the mathematical description of the process, the basic postulate of chemical kinetics is used, taking into account the Langmuir isotherm equation and the Arrhenius equation under non-isothermal conditions. In addition, thermionic emission and evaporation of the target surface are taken into account in the model.
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