Abstract
AbstractWe present a numerical method for iterative computation of electron optical systems influenced by space charge with an improved accuracy in the same calculation time. We replace the common algorithm for evaluating the space charge distribution with a new one based on the calculation of the current density distribution from an aberration polynomial. We introduce a re-meshing algorithm which adapts the mesh used for the field calculation by the finite element method in each iteration to the actual space charge distribution to keep it sufficiently fine in all areas with non-zero space charge.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.