Abstract

A numerical model for simulating short-pulse laser interaction with matters is presented. This model has a capacity to simulate laser beams with various wavelengths and pulse widths down to femtosecond range by directly solving Maxwell’s equations using Finite-Difference Time-Domain (FDTD) method. This method also makes it possible to simulate the laser beam propagation and heat generation in a wide range of materials, such as metals, semiconductors, and dielectrics. Combined with Two-Temperature Model for electrons and lattices, simulation results on the electromagnetic field and thermal energy generation in the silicon substrate and temperature histories of electrons and lattices are presented.A numerical model for simulating short-pulse laser interaction with matters is presented. This model has a capacity to simulate laser beams with various wavelengths and pulse widths down to femtosecond range by directly solving Maxwell’s equations using Finite-Difference Time-Domain (FDTD) method. This method also makes it possible to simulate the laser beam propagation and heat generation in a wide range of materials, such as metals, semiconductors, and dielectrics. Combined with Two-Temperature Model for electrons and lattices, simulation results on the electromagnetic field and thermal energy generation in the silicon substrate and temperature histories of electrons and lattices are presented.

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