Abstract
The dynamic behavior of microfluid devices like miniaturized diaphragm pumps, microvalves and flow channels will be discussed. Special interest is directed to the dynamics of microminiaturized diaphragm pumps. A formalism will be given, which allows the evaluation of the interaction between these pumps and the connected fluid system. The results of the simulation will be compared with transient pressure measurements on pneumatically and electrostatically actuated diaphragm pumps on the millisecond time scale. It will be outlined how the dynamic behavior of more complex fluid systems can be described. Hence the hydraulic simulation of chemical analysis systems, consisting of several micropumps, flow channels, sensing and mixing elements becomes possible in the future.
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