Abstract
The optical analysis and design program RAYTRACE, which was developed at our institute, enables the simulation of micro-optical systems containing arrays of microlenses or other optical components. The most important features of the program are briefly described to show its broad application areas. A special simulation example showing the spot diagram and the intensity distribution in the focal plane of a simple Shack-Hartmann sensor with a diffractive microlens array for an incident aspherical wave is given. © 1998 Society of Photo-Optical Instrumentation Engi- neers. (S0091-3286(98)01906-0)
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