Abstract
High frequency characteristics of the inductance (L) and the quality factor (Q) of square spiral type planar magnetic inductors prepared by direct write techniques were simulated using a Maxwell three-dimensional field simulator. The materials, cross-section shape, thickness and conductivity of the coil were varied to estimate the trend of the inductors' performances. The area dimension of inductors utilised was 1·3 × 1·3 mm. Al2O3 was used as the substrate material. The used inductors with a permalloy (Ni81Fe19) core, silver (Ag) coils, trapezoid shaped cross-section of 30 μm thick coil and coil conductivity of 70% of Ag bulk value exhibit L=12·3 nH, maximum Q=33 near the frequency of 50 MHz and a self-resonant frequency of 0·78 GHz. The simulated high frequency data of inductors agreed well with those obtained from the equivalent circuit model of inductors.
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