Simulation of electron transport in plasmas and solids

Abstract

A cascade model for 1–10 5 eV electron transport in plasmas and solids is proposed. The model is based on the Monte Carlo technique and quantum mechanical description of electron-ion elastic scattering, ionization of ion shells with electron binding energy less than 100 eV, plasmon and electron-hole generation and classical description of inner shell ionization. The main advantage of this model is the detailed description of secondary electron generation without any semiempirical cross sections. The calculated electron backscattering coefficients from Al and Ti are in good agreement with experiments.